EE147

Calendar

Week	Date/Notes	Reading/Resources	homework
1	8/24 8/26	Logistics: What is MEMS: Applications; Course overview, historySingle-mask SOl process	Single-mask SOI motor Hexapod Jaeger:skim chapter 1.and 2.1 2.4. Make sure thatyou understand Figures 2.{2,6, 7,9+11}
2	8/31 9/2	Single-mask capacitive accelerometersimple differential capacitive accelerometerElectrostatic Actuators: Surface micromachining, three-mask process;	Jaeger: 11.1. 11.4
3	9/7 9/9	Surface micromachining: 1 and 2 poly processeStandard processes Standard Processes, SOlMUMPS POLYMUMPs,polyMUMPS pictures , SOLMUMPS pictures ; stress and strain	polyMUMPS thermal actuator Sandia motor videos planar robot video
4	9/14 9/16	beam bendingflexure design, torsion.residual stress, stress gradients, buckling	Euler-Bernoulli beams optional reading:Silicon Failure
5	9/21 9/23	Couette damping, (squeeze-film damping)Resonance, transfer functionⅠTang,Nguyen,Howe comb drive resonator Inchworms
6	9/28 9/30	Transfer function
7	10/5 10/7	Self-sustaining oscillators, Piezoresistivity, strain gaugesWheatstone, TCRstability and pull-in, spring tuning	Fall 2013 midterm;Fall 2014 midterm;Fall 2015 midterm;Fall 2016 midtermFall 2017 midterm;Fall 2020 midterm;TCR;Gauge factor;Black body	6.2 Miller compensation figures 10.{1-6}
8	10/12 10/14	MidtermPaschen, Field emission	2016 Midterm solutions ; 247A project22
9	10/19 10/21	MEMS fabrication, HNA, XeF2bulk micromachining: crystal planes, etch ratesKOH etching	Jaeger Ch 11
10	10/26 10/28	Plasma etchingStandard processes:Semiconductors:Bohr > diodesIon implantation; diffusion; thermal oxidation; diffused piezoresistor	Jaeger Ch 6
11	11/2 11/4	CMOS process cross sectionStandard processes:CMOS MEMSfabrication: evaporation, liftoff	Invensense/Nasiri Nasiri paper CMOS-MEMS Fedder2002 Inte1 22nm Jaeger 9.3
12	11/9 11/11	fabrication:sputtering Veterans Day-Academic and Administrative Holiday	Wikipedia:sputter deposition
13	11/16 11/18	plasma etching: RIE ; DRIELPCVD;Residual stress	Jaeger
14	11/23 11/25	Thanksgiving non-instructional dayacademic holiday
15	11/30 12/2	LPCVD: mousebites, sidewallsthermal no1seloise equivalent input; stiction
16	12/7 12/9	RRR week247: Final projects due Spm Monday 12/7 by both email and hardcopy at 512 Cory Hall	Fall2013 Final;Fall2014 Final;2015 Final;2016 Final;2016 rubric;